UQG Optics

UV FUSED SILICA – SPECTROSIL
Spectrosil® is a synthetic fused silica manufactured using a patented, environmentally friendly process that results in a virtually Chlorine-free material of exceptional purity which is bubble-free and fluorescence-free.

Due to this ultra-high purity, the Spectrosil® 2000 series has excellent optical transmission in the deep UV with a useful range from 180 nm in the deep UV through to 2000 nm in the infrared and is available in a variety of grades for use in a wide range of optical and fibre optic applications.
Optical Properties
Spectrosil® Grade 1000 1000R 2000 2000 2100 2200
Bubbles            
Bubble class (DIN 58927) 0 0 0 0 0 0
Sum of CSA (mm2 / 100 cm2) < 0.03 < 0.03 < 0.03 < 0.03 < 0.03 < 0.03

Maximum Number of inclusions 0 0 0 0 0 0

Striae (MIL-G-174A) N/A N/A 1 Direction free 1 Direction free 3 Direction free 3 Direction free

Granularity None None None None None None

Refractive index hornogeneity*            
Up to 100mm N/A N/A - N/A <5x10-6 <5x10-6
Up to 200mm N/A N/A <25x10-6 N/A <10x10-6 <10x10-6
Over 200mm N/A N/A not specified N/A N/A N/A

Residual strain (nm/cm) N/A N/A <10 (except edge) N/A <5 <5

Fluroescence (254nm excitation) None None None None None None

Standard diameters* 300mm 50mm 300mm 50mm 200mm 200mm
TYPICAL CHEMICAL ANALYSIS
  Spectrosil®
1000
Spectrosil®
2000 Series
Typical trace elements in ppb
Al <20 <10
Ca <10 <10
Co <10 <10
Cr <10 <10
Cu <10 <10
Fe <10 <10
K <10 <10
Li <10 <10
Mg <10 <10
Mn <10 <10
Na <10 <10
Ti <10 <10
V <10 <10
Zn <10 <10
Zr <10 <10
ppm
Cl <1 <1
OH 1000 1000
†Detection limit is 10ppb
Refractive index values
For all grades at 20°C
WAVELENGTH (nm) REFRACTIVE INDEX
200 1.551
220 1.528
240 1.513
248 1.509
254 1.504
260 1.502
280 1.494
300 1.488
320 1.483
340 1.479
360 1.475
400 1.470
500 1.462
589 1.458
633 1.457
700 1.455
800 1.453
900 1.452
1000 1.450
Internal Transmission - Spectrosil® 2200
At 193.4 nm >99.5%
At 248 nm >99.9%
Thermal Data
Strain Point** 990°C
Annealing Point** 1100°C
Softening Point** 1710°C
Thermal Expansion  
Coefficient (Average) 0.54 x 10-6 per degree C
** Note that these values may vary, depending on thermal history of the glass.
Mechanical Data
Density 2.2x103kg/m3
Young's Modulus 73x109 N/m2
Rigidity Modulus 31x109 N/m2
Compressive strength 72.0x9 N/m2
Tensile strength 55x106 N/m2
Shear strength 55x106 N/m2
Transmission
Typical transmission of Spectrosil® 2000 series fused silica
(including Fresnel reflection losses for 10 mm pathlength)



  • Spectrosil® 1000 grade for non-transmissive mirrors and substrates, and other high purity components which do not require specified optical transmission
  • Spectrosil® 2000 deep UV, fluorescence free grade
  • Spectrosil® 2100 with improved refractive index homogeneity
  • Spectrosil® 2200 Excimer laser grade specially developed for maximum transmission and prolonged life in microlithography and other critical deep UV applications using KrF (248 nm) and ArF (193 nm) excimer lasers
WHILE EVERY ATTEMPT HAS BEEN MADE TO VERIFY THE SOURCE OF THE INFORMATION, NO RESPONSIBILITY IS ACCEPTED FOR ACCURACY OF DATA.