Fused Silica Spectosil Optical Materials

UV FUSED SILICA – SPECTROSIL

Spectrosil® is a synthetic fused silica manufactured using a patented, environmentally friendly process that results in a virtually Chlorine-free material of exceptional purity which is bubble-free and fluorescence-free.

Due to this ultra-high purity, the Spectrosil® 2000 series has excellent optical transmission in the deep UV with a useful range from 180 nm in the deep UV through to 2000 nm in the infrared and is available in a variety of grades for use in a wide range of optical and fibre optic applications.

Optical Properties

Spectrosil® Grade	1000	1000R	2000	2000	2100	2200
Bubbles
Bubble class (DIN 58927)	0	0	0	0	0	0
Sum of CSA (mm² / 100 cm²)	< 0.03	< 0.03	< 0.03	< 0.03	< 0.03	< 0.03

Maximum Number of inclusions	0	0	0	0	0	0

Striae (MIL-G-174A)	N/A	N/A	1 Direction free	1 Direction free	3 Direction free	3 Direction free

Granularity	None	None	None	None	None	None

Refractive index hornogeneity*
Up to 100mm	N/A	N/A	-	N/A	<5x10^-6	<5x10^-6
Up to 200mm	N/A	N/A	<25x10^-6	N/A	<10x10^-6	<10x10^-6
Over 200mm	N/A	N/A	not specified	N/A	N/A	N/A

Residual strain (nm/cm)	N/A	N/A	<10 (except edge)	N/A	<5	<5

Fluroescence (254nm excitation)	None	None	None	None	None	None

Standard diameters*	300mm	50mm	300mm	50mm	200mm	200mm

TYPICAL CHEMICAL ANALYSIS

Spectrosil®
1000

Spectrosil®
2000 Series

Typical trace elements in ppb

Al	<20	<10
Ca	<10	<10
Co	<10	<10
Cr	<10	<10
Cu	<10	<10
Fe	<10	<10
K	<10	<10
Li	<10	<10
Mg	<10	<10
Mn	<10	<10
Na	<10	<10
Ti	<10	<10
V	<10	<10
Zn	<10	<10
Zr	<10	<10

ppm

Cl	<1	<1
OH	1000	1000

†Detection limit is 10ppb

Refractive index values
For all grades at 20°C

WAVELENGTH (nm)	REFRACTIVE INDEX
200	1.551
220	1.528
240	1.513
248	1.509
254	1.504
260	1.502
280	1.494
300	1.488
320	1.483
340	1.479
360	1.475
400	1.470
500	1.462
589	1.458
633	1.457
700	1.455
800	1.453
900	1.452
1000	1.450

Internal Transmission - Spectrosil® 2200

At 193.4 nm	>99.5%
At 248 nm	>99.9%

Thermal Data

Strain Point**	990°C
Annealing Point**	1100°C
Softening Point**	1710°C
Thermal Expansion
Coefficient (Average)	0.54 x 10^{-6 per degree C}
** Note that these values may vary, depending on thermal history of the glass.

Mechanical Data

Density	2.2x10³kg/m³
Young's Modulus	73x10^{9 N/m²}
Rigidity Modulus	31x10^{9 N/m²}
Compressive strength	72.0x^{9 N/m²}
Tensile strength	55x10^{6 N/m²}
Shear strength	55x10^{6 N/m²}

Transmission

Typical transmission of Spectrosil® 2000 series fused silica
(including Fresnel reflection losses for 10 mm pathlength)

Spectrosil® 1000 grade for non-transmissive mirrors and substrates, and other high purity components which do not require specified optical transmission
Spectrosil® 2000 deep UV, fluorescence free grade
Spectrosil® 2100 with improved refractive index homogeneity
Spectrosil® 2200 Excimer laser grade specially developed for maximum transmission and prolonged life in microlithography and other critical deep UV applications using KrF (248 nm) and ArF (193 nm) excimer lasers

WHILE EVERY ATTEMPT HAS BEEN MADE TO VERIFY THE SOURCE OF THE INFORMATION, NO RESPONSIBILITY IS ACCEPTED FOR ACCURACY OF DATA.