ITO GLASS
MATERIAL DATA
GLASS COMPOSITION (TYPICAL, % BY WEIGHT)SODA LIME
AI2 O31.0 -1.9
CaO7.-12
FE2 O30.08 - 0.14
MgO1.0 - 4.5
Na2 O + K2 O13 -15
SO40 - 0.3
SiO270-73

CHEMICAL RESISTANCE (TYPICAL)
 SODA LIME
Alkali attack DINISO695/DIN523221
Acid resistance DIN121163
Hydrolytic resistance ISO709/DIN121113

PHYSICAL PROPERTIES (TYPICAL)
 SODA LIME
Density103 kg/m32.498
Young’s Modulus103 kg/mm27.5
Poisson Ratio0.22
Vickers Hardness103 kg/mm20.63
Shear Modulus103 kg/mm2
Thermal Expansion10–6 /K8.5 – 9.0
 at °C20 – 350
Specific HeatCal/g°C0.18
 at °C0 – 50
Thermal ConductKcal/m h °C0.65
Strain Point°C523
Softening Point°C525 - 555
Annealing Point°C720 – 740
Transmittance%≥ 90
Refractive Index1.517

ELECTRICAL PROPERTIES (TYPICAL)
 SODA LIME
Volume resistivity / log Ω cm 
At 20 °C13.5
At 50 °C12
At 100 °C10
At 200 °C7.3
At 300 °C5.6
Dielectric constant7.6 (at 1 kHz)
Dielectric loss (tan Ø)0.02 (at 1 kHz)

BARRIER COATING - SiO2
Properties 
Thickness (specified)nm ≥ 20λ
Thickness (typical)nm 23
Barrier efficiency (Na ion diffusion)μg/cm2 ≤ 0.1
Transmittance at l = 550nm% ≥ 89
Refractive index at l = 632.8nm typical1.5
Chemical resistance in HFnm/min ≤ 20 (linear part)
Chemical resistance in HF for VIS Vnm/min ≤ 25 (linear part)
Adhesive tape testok
Rubber testok

ETCHING
The coating will be removed completely when placed in an unagitated solution with the constituents and temperature as specified below. Sufficient deionized water rinsing after etching is essential.
Fully oxidized ITO
HGI Etchant
Hydrochloric acid con c. > 32% Vol % 48.1
Nitric acid con c. 65 % Vol % 3.8
Deionized water Vol %48.1
Temperature ° C45± 1
Etch timeSec/nm ITO thickness ≤ 3.5
HBr Etchant
Hydrobromic acid con c. 48%Vol % 100
Temperature ° C45± 1
Etch timeSec/nm ITO thickness ≤ 1
  
Partially oxidized ITO
HCI Etchant
Hydrochloric acid con c. > 32%Vol % 14.5
Nitric acid con c. 65 %Vol % 0.5
Deionized waterVol % 85.0
Temperature° C 25± 2
Etch timeSec/nm ITO thickness ≤ 0.5

Oxidation: Recommended oxidation of partially oxidized ITO in circulated air oven with ambient air 390°C / 30 min

TRANSPARENT CONDUCTIVE COATING – FULLY OXIDIZED ITO
Common Properties 
Etchability in HCINm/sec ≥ 0.3 (linear part)
Etchability in HBrNm/sec ≥ 1.0 (linear part)
Refractive index at = 632.8nm typical1.85
Chemical resistance in NaOH 
    - change of sheet resistance% ≤ 10
    - change of appearancenone
Temperature stability (change of sheet resistance)After cycle at 300 °C, 30 min.% ≤ 250
Humidity stability – change of sheet resistance% ≤ 10
Adhesive tape testOk
Rubber testOk


WHILE EVERY ATTEMPT HAS BEEN MADE TO VERIFY THE SOURCE OF THE INFORMATION, NO RESPONSIBILITY IS ACCEPTED FOR ACCURACY OF DATA.


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